Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen trifluoride Nitrogen trifluoride serves as an efficient etchant and an essential chamber cleaning agent in various industrial processes.Renowned for its multifaceted applications, it acts as a vital fluorine source for high-energy chemical lasers utilizing hydrogen fluoride and fluoride gas. Its unmatched performance as a plasma etching gas elevates its status in the microelectronics industry. Categorized as a class 2.2 toxic gas, it necessitates strict compliance with safety standards, maintaining its maximum allowable content in the air at 29mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Founded in 2016, Jiangsu Deou Gas Co., Ltd. has swiftly ascended the ranks to become a preeminent manufacturer and global exporter of industrial, special, electronic, and medical gases. Our diverse product suite is indispensable across an array of sectors, from chemical and shipbuilding to electronics and optical fiber communication, not to forget its pivotal roles in machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We are committed to excellence, offering a vast range of cylinder gases, electronic gases, and comprehensive equipment solutions, including gas tanks, panels, valves, and fittings. Our engineering prowess extends robust services to clients both in China and internationally. Our unwavering mission is to cultivate enduring global partnerships, delivering state-of-the-art, dependable products augmented by expert support and bespoke solutions.
Our comprehensive product offerings encompass H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, doped gas mixtures (featuring TMB, PH3, and B2H6), and extend to xenon, neon, krypton, among a plethora of other advanced electronic gases.
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Packaging & Shipping
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Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.