Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen trifluorideEsteemed for its remarkable efficacy, our Nitrogen trifluoride serves as a premier etchant and chamber cleaning agent, setting the standard in performance excellence.Celebrated for its incredible adaptability, Nitrogen trifluoride is a quintessential fluorine source for high-energy chemical lasers operating with hydrogen fluoride and fluoride gas. This outstanding plasma etching gas enjoys extensive utilization within the microelectronics industry. Recognized as a class 2.2 toxic gas, its maximum concentration permissible in the ambient air is stringently regulated at 29mg/m3, ensuring safe usage.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Since its inception in 2016, Jiangsu Deou Gas Co., Ltd. has swiftly emerged as a leader in the production and global exportation of an exceptional spectrum of industrial, special, electronic, and medical gases. Our premium-quality products are vital to a diverse range of industries such as chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food processing, medical, solar photovoltaic, LED technology, aerospace, and scientific research. We are proud to offer an all-encompassing range of cylinder gases, electronic gases, and integrated gas equipment including tanks, panels, valves, and fittings. Our esteemed engineering services span not only across China but also reach an international clientele. We are committed to fostering strong global partnerships by providing advanced and reliable products along with outstanding support and tailored solutions.
Our extensive product catalog is a testament to our dedication, featuring an impressive variety of gases including: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, and specialized doped gas mixtures such as TMB, PH3, and B2H6. Additionally, we offer xenon, neon, krypton, and a broad spectrum of other advanced electronic gases, catering to a wide array of industry needs.

Packaging & Shipping

Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.