| Model NO. |
NF3 |
| Origin |
Suzhou, China |
| Production Capacity |
600t/Year |
| Transport Package |
Cylinder/ISO Tank |
| Trademark |
Deou |
| HS Code |
2812190091 |
Product Description
Nitrogen trifluoride serves as a highly effective etchant and chamber cleaning agent.This remarkable compound is utilized as a fluorine source for high-energy chemical lasers, specifically hydrogen fluoride and fluoride gas lasers. In the microelectronics industry, it stands out as an exceptional plasma etching gas. Despite being classified as a class 2.2 toxic gas, its maximum permissible concentration in the atmosphere is rigorously controlled at 29mg/m3 to ensure safety.
Specifications:
| Product Name |
Nitrogen Trifluoride |
| Type |
NF3 |
| Purity |
n4.6 |
| ISO Tank Spec |
8800L |
| Fill contens (20?C) |
4000kg |
| Valve type |
DISS 640 |
| Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Founded in 2016, Jiangsu Deou Gas Co., Ltd. has risen to prominence as a foremost manufacturer and international exporter, delivering an extraordinary array of industrial, specialty, electronic, and medical gases. Our remarkable range of products plays a pivotal role across numerous industries such as chemical engineering, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food processing, healthcare, solar photovoltaics, LED technology, aerospace, and scientific research. We are proud to offer a comprehensive selection of cylinder gases, advanced electronic gases, and integrated systems, including gas tanks, panels, valves, and fittings. Our renowned engineering services extend throughout China and around the globe. Our unwavering mission is to establish strong international partnerships, providing innovative, dependable products with dedicated support and customized solutions.
Our comprehensive product catalog features: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, doped gas mixtures (including TMB, PH3, and B2H6), alongside xenon, neon, krypton, and a diverse range of other advanced electronic gases.
Packaging & Shipping
Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.
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