Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deo |
HS Code |
2812190091 |
Product Description
Nitrogen TrifluorideRenowned for its exceptional efficiency, nitrogen trifluoride is celebrated as a premier etchant and chamber cleaning agent, elevating the standards in industrial applications.Celebrated for its extraordinary versatility, nitrogen trifluoride plays a crucial role as a fluorine source in high-energy chemical lasers, such as hydrogen fluoride and fluoride gas. This extraordinary plasma etching gas is extensively utilized in the microelectronics industry. As a class 2.2 toxic gas, its ambient concentration is stringently controlled to a safe limit of 29mg/m3, ensuring user safety and peace of mind.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Established in 2016, Jiangsu Deo Gas Co., Ltd. has rapidly positioned itself as a leading manufacturer and global exporter with an outstanding range of industrial, special, electronic, and medical gases. Our top-tier products are indispensable across various sectors such as chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We take pride in offering an extensive array of cylinder gases, electronic gases, and comprehensive equipment including gas tanks, panels, valves, and fittings. Our prestigious engineering services are available throughout China and internationally. We are committed to building robust global partnerships, offering cutting-edge, dependable products paired with unparalleled support and custom solutions.
Our comprehensive product catalog features an impressive range of gases including: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, and doped gas mixtures such as TMB, PH3, and B2H6, in addition to xenon, neon, krypton, and an extensive variety of other sophisticated electronic gases.

Packaging & Shipping

Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.