Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen trifluoride serves as a highly effective etchant and chamber cleaning agent.Renowned for its versatility, Nitrogen trifluoride is utilized as a fluorine source for high-energy chemical lasers in hydrogen fluoride and fluoride gas. This exceptional plasma etching gas finds widespread application in the microelectronics industry. Classified as a class 2.2 toxic gas, its maximum permissible concentration in the air is strictly regulated at 29mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Established in 2016, Jiangsu Deou Gas Co., Ltd. has rapidly ascended to prominence as a foremost manufacturer and international exporter, offering an extraordinary array of industrial, special, electronic, and medical gases. Our superior products are indispensable across myriad industries, including chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We take pride in providing a comprehensive selection of cylinder gases, electronic gases, and integrated equipment such as gas tanks, panels, valves, and fittings. Our prestigious engineering services extend across China and to a global audience. Our unyielding mission is to cultivate robust global partnerships, delivering advanced, dependable products coupled with exceptional support and bespoke solutions.
Our vast product catalog features a wide array of gases including: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, and doped gas mixtures such as TMB, PH3, and B2H6, in addition to xenon, neon, krypton, and an extensive variety of other advanced electronic gases.

Packaging & Shipping

Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.