Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen Trifluoride This extraordinary gas serves as both an etchant and chamber cleaning agent.Renowned for its versatility, it acts as a fluorine source for high-energy chemical lasers of hydrogen fluoride and fluoride gas. In the microelectronics industry, it shines as an outstanding plasma etching gas. As a Class 2.2 toxic gas, careful monitoring is essential to ensure its content in the air remains below the maximum allowable threshold of 29mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Established in 2016, Jiangsu Deou Gas Co., Ltd. quickly rose to prominence as a leading manufacturer and global exporter, offering an exceptional range of industrial, specialty, electronic, and medical gases. Our high-caliber products are indispensable across various industries, such as chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We proudly provide a comprehensive array of cylinder gases, electronic gases, and integrated equipment, including gas tanks, panels, valves, and fittings. Our esteemed engineering services extend across China and internationally, as we strive to build strong global partnerships by delivering cutting-edge, trustworthy products, along with devoted support and customized solutions.
Our extensive product catalog is a testament to our expertise, featuring gases such as H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, doped gas mixtures (including TMB, PH3, and B2H6), as well as xenon, neon, krypton, and a diverse array of other advanced electronic gases.

Packaging & Shipping

Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.