Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen trifluoride is an exceptional etchant and chamber cleaning agent ideal for precision applications.A versatile fluorine source for high-energy chemical lasers of hydrogen fluoride and fluoride gas, nitrogen trifluoride shines as a premier plasma etching gas within the microelectronics industry. As a class 2.2 toxic gas, it requires careful handling, with a maximum permissible content in the air of 29mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Since its inception in 2016, Jiangsu Deou Gas Co., Ltd. has flourished as a preeminent manufacturer and global exporter, delivering an impressive array of industrial, special, electronic, and medical gases. Our distinguished products serve pivotal roles across a multitude of industries, including chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We are committed to providing a comprehensive suite of cylinder gases, electronic gases, and integrated equipment, such as gas tanks, panels, valves, and fittings, to our esteemed clientele. Our engineering services extend both throughout China and around the globe. Our unwavering mission is to cultivate enduring global alliances by offering innovative, trustworthy products, supported by dedicated service and customized solutions.
Our extensive product catalog features: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, doped gas mixtures (such as TMB, PH3, and B2H6), alongside xenon, neon, krypton, and an array of other advanced electronic gases.
Packaging & Shipping
Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.