Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen trifluoride is an exceptional etchant and chamber cleaning agent renowned for its effectiveness.This versatile compound serves as an essential fluorine source for high energy chemical lasers, specifically those of hydrogen fluoride and fluoride gas. It is celebrated as an outstanding plasma etching gas within the microelectronics industry. Classified as a class 2.2 toxic gas, it mandates stringent safety measures with its maximum permissible air concentration limited to 29 mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Founded in 2016, Jiangsu Deou Gas Co., Ltd. has swiftly ascended to become a vanguard manufacturer and esteemed global exporter, offering an extraordinary array of industrial, special, electronic, and medical gases. Our unrivaled products are pivotal across a multitude of industries, spanning chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We proudly offer a comprehensive selection of cylinder gases, electronic gases, and state-of-the-art integrated equipment, including gas tanks, panels, valves, and fittings. With revered engineering services extending to both China and the international market, our unwavering mission is to cultivate strong global partnerships, delivering cutting-edge, reliable products complemented by exceptional support and bespoke solutions.
Our comprehensive product catalog is a testament to our innovation, featuring: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, doped gas mixtures (including TMB, PH3, and B2H6), as well as xenon, neon, krypton, and an extensive array of other advanced electronic gases.

Packaging & Shipping

Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.