| Model NO. |
NF3 |
| Origin |
Suzhou, China |
| Production Capacity |
600t/Year |
| Transport Package |
Cylinder/ISO Tank |
| Trademark |
Deou |
| HS Code |
2812190091 |
Product Description
Nitrogen trifluoride serves as a premier etchant and chamber cleaning agent.Embrace the power of Nitrogen trifluoride, a dynamic fluorine source pivotal in high-energy chemical lasering of hydrogen fluoride and fluoride gas. Its supreme efficacy as a plasma etching gas makes it indispensable in the microelectronics industry. Classified as a class 2.2 toxic gas, it demands stringent handling with a permissible air concentration threshold of just 29mg/m3.
Specifications:
| Product Name |
Nitrogen Trifluoride |
| Type |
NF3 |
| Purity |
n4.6 |
| ISO Tank Spec |
8800L |
| Fill contens (20?C) |
4000kg |
| Valve type |
DISS 640 |
| Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Founded in 2016, Jiangsu Deou Gas Co., Ltd. stands as a beacon of excellence, rapidly ascending to become a top-tier manufacturer and global exporter. Our esteemed portfolio boasts an astonishing array of industrial, special, electronic, and medical gases. These high-caliber products are vital across multifarious industries such as chemicals, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical fields, solar photovoltaic, LED technology, aerospace, and scientific research. We offer an extensive selection of cylinder gases, advanced electronic gases, and integrated solutions featuring gas tanks, panels, valves, and fittings. Our expert engineering services are meticulously crafted for clientele both within China and on the global stage. We passionately commit to cultivating robust global partnerships, delivering pioneering, dependable products, complete with dedicated support and bespoke solutions.
Our comprehensive product catalog proudly displays an array of gases: H2, O2, N2, Ar, CO2, propane, acetylene, helium, an assortment of laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, and doped gas mixtures (including TMB, PH3, and B2H6), not forgetting the noble gases like xenon, neon, krypton, and a plethora of other sophisticated electronic gases.
Packaging & Shipping
Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.
Audited Supplier 
){kind=link}