Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen Trifluoride An exceptional etchant and chamber cleaning agent, nitrogen trifluoride stands as a pivotal component in the microelectronics sector.Nitrogen trifluoride serves as a vital fluorine source for high-energy chemical lasers, such as hydrogen fluoride and fluoride gas. Its superior efficacy as a plasma etching gas makes it indispensable in the microelectronics industry. Classified as a class 2.2 toxic gas, it necessitates safety with a maximum permissible concentration in air of 29mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Since its inception in 2016, Jiangsu Deo Gas Co., Ltd. has soared to prominence as an eminent manufacturer and global exporter. Our diverse and unparalleled selection of industrial, special, electronic, and medical gases meets the demands of myriad sectors such as chemical, shipbuilding, electronics, and more. Our distinguished offerings include an array of cylinder gases, advanced electronic gases, and comprehensive equipment like gas tanks, panels, and valves. We proudly extend our esteemed engineering services across China and the globe, committed to establishing enduring global partnerships. Our mission is to deliver innovative, reliable products backed by unwavering support and bespoke solutions.
Our extensive product catalog boasts an impressive lineup: H2, O2, N2, Ar, CO2, propane, acetylene, helium, refined laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, along with doped gas mixtures such as TMB, PH3, and B2H6, and a spectrum of sophisticated electronic gases including xenon, neon, and krypton.
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Packaging & Shipping
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Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.