Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen trifluoride serves as a superior etchant and chamber cleaning agent.This remarkable gas is utilized as a fluorine source for high-energy chemical lasers, specifically hydrogen fluoride and fluoride gas. It stands out as an exceptional plasma etching gas within the microelectronics industry. Notably, it is categorized as a class 2.2 toxic gas, with a maximum allowable concentration in the air of 29mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Founded in 2016, Jiangsu Deou Gas Co., Ltd. has swiftly ascended as a premier manufacturer and international exporter, offering an extraordinary array of industrial, special, electronic, and medical gases. Our peerless products play pivotal roles in a multitude of industries, encompassing chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We proudly deliver a comprehensive suite of cylinder gases, electronic gases, and integrated equipment, including gas tanks, panels, valves, and fittings. Our celebrated engineering services extend across China and the globe. Our unwavering mission is to cultivate robust global partnerships, delivering innovative, dependable products with unwavering support and bespoke solutions.
Our extensive product catalog boasts: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, doped gas mixtures (including TMB, PH3, and B2H6), as well as xenon, neon, krypton, and a wide array of other sophisticated electronic gases.
Packaging & Shipping
Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.