Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deou |
HS Code |
2812190091 |
Product Description
Nitrogen trifluoride Nitrogen trifluoride serves as an exceptional etchant and chamber cleaning agent.Widely recognized for its role as a fluorine source, it powers high-energy chemical lasers of hydrogen fluoride and fluoride gas. In the microelectronics industry, it stands out as an unparalleled plasma etching gas. Classified as a class 2.2 toxic gas, its maximum permissible concentration in the air is 29mg/m3.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Established in 2016, Jiangsu Deou Gas Co., Ltd. has quickly ascended to prominence as a renowned manufacturer and global exporter. Our extraordinary selection includes industrial, special, electronic, and medical gases, integral to numerous pivotal industries such as chemical, shipbuilding, electronics, optical fiber communication, and beyond. We proudly offer a comprehensive suite of cylinder gases, electronic gases, and integrated systems, including gas tanks, panels, valves, and fittings. Our esteemed engineering services benefit both domestic and international clients. We are steadfast in our mission to cultivate robust global partnerships, delivering innovative, dependable products alongside unwavering support and bespoke solutions.
Our extensive product catalog proudly features a diverse array: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, and doped gas mixtures (including TMB, PH3, and B2H6). We also offer xenon, neon, krypton, and an array of other advanced electronic gases for sophisticated applications.

Packaging & Shipping

Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.