Model NO. |
NF3 |
Origin |
Suzhou, China |
Production Capacity |
600t/Year |
Transport Package |
Cylinder/ISO Tank |
Trademark |
Deo |
HS Code |
2812190091 |
Product Description
Nitrogen trifluorideRenowned for its unparalleled efficiency, nitrogen trifluoride serves as a premier etchant and chamber cleaning agent.Famed for its remarkable adaptability, nitrogen trifluoride is integral as a fluorine source for high-energy chemical lasers like hydrogen fluoride and fluoride gas. This outstanding plasma etching gas is extensively employed within the microelectronics sector. Recognized as a class 2.2 toxic gas, its ambient concentration is meticulously capped at 29mg/m3 for safety.
Specifications:
Product Name |
Nitrogen Trifluoride |
Type |
NF3 |
Purity |
n4.6 |
ISO Tank Spec |
8800L |
Fill contens (20?C) |
4000kg |
Valve type |
DISS 640 |
Applications |
Semiconductor: Plasma etching gas, used in plasma dry
etching process. |
Company Information:
Founded in 2016, Jiangsu Deo Gas Co., Ltd. has swiftly emerged as a preeminent manufacturer and global exporter, offering an impressive spectrum of industrial, special, electronic, and medical gases. Our premium products are vital across numerous sectors, including chemical, shipbuilding, electronics, optical fiber communication, machinery manufacturing, food, medical, solar photovoltaic, LED, aerospace, and scientific research. We pride ourselves on presenting a vast selection of cylinder gases, electronic gases, and integrated equipment such as gas tanks, panels, valves, and fittings. Our esteemed engineering services are available throughout China and to an international clientele. Our steadfast mission is to forge strong global alliances, delivering state-of-the-art, reliable products, coupled with unparalleled support and tailored solutions.
Our extensive product catalog boasts an impressive assortment of gases including: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser gas mixtures, SiH4, SiH2Cl2, SiHCl3, SiCl4, NH3, CF4, NF3, SF6, HCl, N2O, and doped gas mixtures such as TMB, PH3, and B2H6, alongside xenon, neon, krypton, and a vast range of other sophisticated electronic gases.

Packaging & Shipping

Q: What's your product price?
A: Pricing for each gas is influenced by market supply and demand, quantity, and purity, making it difficult to set a fixed price. If you are interested in any specific gas, please provide your detailed requirements, and I would be happy to offer you a tailored quote.
Q: What is the minimum order quantity?
A: Minimum order quantities vary across different products. Please share your specific requirements with us, and we will provide the relevant details.
Q: What is the delivery time?
A: If the cylinder is in stock and only requires gas filling, delivery is approximately 7-10 days ex-works after receiving the deposit. Custom cylinder orders require about 15-35 days ex-works post-deposit, depending on the quantity.
Q: How do you ensure gas quality?
A: Our cylinders undergo a thorough treatment process, including cleaning, drying, vacuum pumping, and replacement before gas filling to ensure they are clear and dry. Each treated cylinder is tested for internal purity. After filling, all gases are tested once more. If the gas fails to meet standards, it is reprocessed. Finally, we provide a qualified gas test report.
Q: Are all cylinders recyclable?
A: Typically, seamless steel cylinders are recyclable. However, disposable cylinders are intended for single use only.
Q: Can we send back cylinders to China for refilling?
A: Yes, you can send back our cylinders for refilling. Inform us before exporting, and we will manage all necessary import customs clearance formalities.